Precision ceramic components are key equipment components in multiple semiconductor manufacturing processes such as photolithography, etching, thin film deposition, ion implantation, CMP, etc., such as bearings, guides, liners, electrostatic suction ...

Alumina ceramics are widely used ceramic materials due to their excellent mechanical properties, electrical properties, and chemical stability. However, its high brittleness and poor fracture toughness severely limit its application in a wider range ...

Generally speaking, sintering is the process of compressing powder or powder and using heat (usually heated to a temperature lower than the melting point of the matrix component) to generate mutual attraction of molecules or atoms in the solid state....